射频电容放电物理

本书详细介绍了中低压高频（射频）电容放电（RFCD）的物理机理和放电等离子体的特性。本文还研究了RFCD的主要性能和特点，以及在高频场中的击穿特性。探索了电极的空间特性和电极附近的电荷传输过程。这项工作面向从事气体放电物理和低温等离子体的科学家、物理、物理化学和相关专业的研究生和学生。
Physics of Radiofrequency Capacitive Discharge
This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The main properties and characteristics of RFCD, the features of electric breakdown in a high-frequency field are also investigated. The properties of near-electrode layers of a spatial discharge, the nature of the electric field in them, and the processes of charge transport to electrodes are explored. The work is intended for scientists engaged in gas discharge physics and low-temperature plasmas, graduate students and students of physics, physical chemistry, and relevant specialties.

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